|
Goodrich's Electro-Optical Systems has produced lithographic
optics for most of the major lithographic equipment
manufacturers. These optics include primary mirrors,
beamsplitters, illumination system optics, stepper lenses,
aspheric elements, prisms, windows, and micro-lens arrays.
Goodrich has developed superior polishing techniques for most
materials used in today's lithographic tools such as fused
silica, Zerodur®, and calcium fluoride. Most optics used in
modern deep UV lithographic tools require surfaces less than
0.005 waves RMS at 632.8 nm and scratch/dig specifications less
than 20/10.
|
|
