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Surface Quality
- Up to 200 mm in Diameter
- Surface Figure < 2.0 nm RMS
- Residual Figure (1-37 Zernikes removed) <1.0 nm RMS
- Scratch Dig 40-20
- Radius Tolerance ± 4 µm
- Axial Thickness Tolerance ± 25 µm
Metrology Capability
- Surface Figure Accuracy < 1.0 nm (full band)
- Radius Accuracy ± 1.5 µm
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